Abstract
Impact ionization and hot-carrier degradation (HCD) in buried-channel-array transistors (BCATs), which are used as the cell transistor, were investigated using sub-30 nm DRAM technology. The impact ionization rate was calculated by measuring the substrate current at different measurement conditions and modeled using an energy-driven model, which is suitable for short-channel transistors. In addition, HCD in BCAT under various operation conditions was analyzed. A multitrap-based approach, in which both interface- and oxide-trap generation were considered, was used to fit the experimental results. Our analysis and modeling results are useful in understanding and predicting the reliability of dynamic random access memory.
Original language | English |
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Article number | 9393379 |
Pages (from-to) | 653-656 |
Number of pages | 4 |
Journal | IEEE Electron Device Letters |
Volume | 42 |
Issue number | 5 |
DOIs | |
State | Published - May 2021 |
Keywords
- DRAM cell transistor
- DRAM reliability
- Hot-carrier degradation
- buried-channel-array transistor
- cryogenic computing system
- impact ionization