Abstract
The two-dimensional (2D) grazing-incidence small-angle x-ray scattering (GISAXS) technique was used to characterize the pore shape, size distribution, electron density and porosity in nanoporous dielectric thin films of a nanoscale thickness. Transmission electron microscopy showed that the nanopores generated in the sample polymethylsilsesquioxane (PMSSQ) film were spherical in shape and that their size were around 5 nm. The pores were generated in the film by the the sacrificial thermal degradation of the star shaped mPCL6 (six-armed poly(ε-caprolactone)). The results show that the triethoxysilyl modification of the end groups of the PCL6 porogen reduces the aggregation of the porogen molecules in the preparation of sample film.
Original language | English |
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Pages (from-to) | 696-701 |
Number of pages | 6 |
Journal | Advanced Materials |
Volume | 17 |
Issue number | 6 |
DOIs | |
State | Published - 22 Mar 2005 |