Imprinting well-controlled nanopores in organosilicate dielectric films: Triethoxysilyl-modified six-armed poly(ε-caprolactone) and its chemical hybridization with an organosilicate precursor

Byeongdu Lee, Weontae Oh, Yongtaek Hwang, Young Hee Park, Jinhwan Yoon, Kyeong Sik Jin, Kyuyoung Heo, Jehan Kim, Kwang Woo Kim, Moonhor Ree

Research output: Contribution to journalArticlepeer-review

109 Scopus citations

Abstract

The two-dimensional (2D) grazing-incidence small-angle x-ray scattering (GISAXS) technique was used to characterize the pore shape, size distribution, electron density and porosity in nanoporous dielectric thin films of a nanoscale thickness. Transmission electron microscopy showed that the nanopores generated in the sample polymethylsilsesquioxane (PMSSQ) film were spherical in shape and that their size were around 5 nm. The pores were generated in the film by the the sacrificial thermal degradation of the star shaped mPCL6 (six-armed poly(ε-caprolactone)). The results show that the triethoxysilyl modification of the end groups of the PCL6 porogen reduces the aggregation of the porogen molecules in the preparation of sample film.

Original languageEnglish
Pages (from-to)696-701
Number of pages6
JournalAdvanced Materials
Volume17
Issue number6
DOIs
StatePublished - 22 Mar 2005

Fingerprint

Dive into the research topics of 'Imprinting well-controlled nanopores in organosilicate dielectric films: Triethoxysilyl-modified six-armed poly(ε-caprolactone) and its chemical hybridization with an organosilicate precursor'. Together they form a unique fingerprint.

Cite this