In-situ grazing incidence small-angle X-ray scattering studies on nanopore evolution in low-k organosilicate dielectric thin films

Byeongdu Lee, Jinhwan Yoon, Weontae Oh, Yongtaek Hwang, Kyuyoung Heo, Kyeong Sik Jin, Jehan Kim, Kwang Woo Kim, Moonhor Ree

Research output: Contribution to journal › Article › peer-review

132 Scopus citations

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