In-situ grazing incidence small-angle X-ray scattering studies on nanopore evolution in low-k organosilicate dielectric thin films
- Byeongdu Lee
- , Jinhwan Yoon
- , Weontae Oh
- , Yongtaek Hwang
- , Kyuyoung Heo
- , Kyeong Sik Jin
- , Jehan Kim
- , Kwang Woo Kim
- , Moonhor Ree
- Pohang University of Science and Technology
Research output: Contribution to journal › Article › peer-review
133
Scopus
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