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In situ negative patterning of p-silicon via scanning probe lithography in HF/EtOH liquid bridges

  • Younghun Kim
  • , Sung Koo Kang
  • , Inhee Choi
  • , Jeongjin Lee
  • , Jongheop Yi
  • Seoul National University

Research output: Contribution to journal › Article › peer-review

21 Scopus citations

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