In situ negative patterning of p-silicon via scanning probe lithography in HF/EtOH liquid bridges

Younghun Kim, Sung Koo Kang, Inhee Choi, Jeongjin Lee, Jongheop Yi

Research output: Contribution to journalArticlepeer-review

19 Scopus citations

Fingerprint

Dive into the research topics of 'In situ negative patterning of p-silicon via scanning probe lithography in HF/EtOH liquid bridges'. Together they form a unique fingerprint.

Material Science