Independent double-gate fin SONOS flash memory fabricated with sidewall spacer patterning

  • Jang Gn Yun
  • , Yoon Kim
  • , II Han Park
  • , Jung Hoon Lee
  • , Daewoong Kang
  • , Myoungrack Lee
  • , Hyungcheol Shin
  • , Jong Duk Lee
  • , Byung Gook Park

Research output: Contribution to journal › Article › peer-review

16 Scopus citations

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Material Science

Chemical Engineering