Influence of hydrogen annealing on low temperature (≤ 200 °C) silicon nitride films for display devices

Kyoung Min Lee, Jae Dam Hwang, Yeon Jin Lee, Kil Sun No, Wan Shick Hong

Research output: Contribution to conferencePaperpeer-review

Fingerprint

Dive into the research topics of 'Influence of hydrogen annealing on low temperature (≤ 200 °C) silicon nitride films for display devices'. Together they form a unique fingerprint.

Material Science