Abstract
The channel potential of natural local self-boosting (NLSB) effects in 16-layer 3D NAND flash memory was analyzed according to transient time. After a program pulse was applied to the selected word line (WL) of the inhibited string channel, the channel potential of the selected WL increased owing to NLSB. The channel potential of the selected WL, increased by NLSB, was analyzed as a function of the threshold voltage (Vth) of the adjacent cell and according to the change in time. The analysis confirmed that the channel potential value decreased gradually over time. However, it was confirmed that the rate at which the channel potential decreases was different depending on the Vth of the adjacent cell. The number of electrons in nitride is different for each Vth. These electrons affect the holes of the spacer and channel. The analysis also confirmed that the movement of electrons was caused by the difference in the hole concentration in the spacer and channel.
Original language | English |
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Article number | 2909 |
Journal | Applied Sciences (Switzerland) |
Volume | 13 |
Issue number | 5 |
DOIs | |
State | Published - Mar 2023 |
Keywords
- 3D NAND flash memory
- channel potential
- inhibited string
- natural local self-boosting (NLSB)
- selected WL