Investigation of capture and emission dependence between individual traps from complex random telegraph signal noise analysis

The random telegraph signal (RTS) noise causes important reliability issues. Complex RTS noise is frequently observed by more than two traps. Originally, it is supposed that the capture and emission between these two traps proceed independently. 4-level complex RTS noise was observed and the characteristics of two individual traps were investigated by using two different methods, which are dependent or independent on capture and emission process between two traps. Thus, the capture and emission dependence of one trap on the state of the other trap, which is trapped or de-trapped, is made clear in conventional and high-K metal gate MOSFET.