Investigation of work function variation induced by metal gate and process variation effect in 3D stacked nanowire FET devices

Kyul Ko, Dokyun Son, Changbeom Woo, Myounggon Kang, Hyungcheol Shin

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'Investigation of work function variation induced by metal gate and process variation effect in 3D stacked nanowire FET devices'. Together they form a unique fingerprint.

Engineering

Material Science

Chemical Engineering