Light scattering by metallic particles on silicon wafers

Research output: Contribution to journal › Comment/debate

Original language	English
Pages (from-to)	382
Number of pages	1
Journal	Journal of Research of the National Institute of Standards and Technology
Volume	107
Issue number	4
State	Published - Jul 2002

Cite this

@article{d0bd67848e8d4c7bb172f4fd00bd542f,

title = "Light scattering by metallic particles on silicon wafers",

author = "Kim, \{Jung Hyeun\} and Ehrman, \{Sheryl H.\} and Mulholland, \{George W.\} and Germera, \{Thomas A.\}",

year = "2002",

month = jul,

language = "English",

volume = "107",

pages = "382",

journal = "Journal of Research of the National Institute of Standards and Technology",

issn = "1044-677X",

publisher = "National Institute of Standards and Technology",

number = "4",

}

TY - JOUR

T1 - Light scattering by metallic particles on silicon wafers

AU - Kim, Jung Hyeun

AU - Ehrman, Sheryl H.

AU - Mulholland, George W.

AU - Germera, Thomas A.

PY - 2002/7

Y1 - 2002/7

UR - https://www.scopus.com/pages/publications/35549013984

M3 - Comment/debate

AN - SCOPUS:35549013984

SN - 1044-677X

VL - 107

SP - 382

JO - Journal of Research of the National Institute of Standards and Technology

JF - Journal of Research of the National Institute of Standards and Technology

IS - 4

ER -