Locally-separated vertical channel SONOS flash memory (LSVC SONOS) for multi-storage and multi-level operation

Yoon Kim; Jang Gn Yun; Il Han Park; Seongjae Cho; Jung Hoon Lee; Se Hwan Park; Dong Hua Lee; Doo Hyun Kim; Gil Sung Lee; Won Bo Sim; Jong Duk Lee; Byung Gook Park

doi:10.1109/SNW.2008.5418389

Locally-separated vertical channel SONOS flash memory (LSVC SONOS) for multi-storage and multi-level operation

Yoon Kim, Jang Gn Yun, Il Han Park, Seongjae Cho, Jung Hoon Lee, Se Hwan Park, Dong Hua Lee, Doo Hyun Kim, Gil Sung Lee, Won Bo Sim, Jong Duk Lee, Byung Gook Park

School of Electrical and Computer Engineering

Seoul National University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

A SONOS flash memory having locally-separated vertical channels is investigated. The vertical SONOS flash memory has a scaling issue related with the fin width. As the fin width is shorter, electrical interference between paired cells (PCI) is severer. To overcome PCI, we propose the locally-separated vertical channel SONOS (LSVC SONOS) structure. We demonstrate reliable operation of LSVC SONOS using ATLAS simulation. This device structure is promising for multi-storage and multi-level operation.

Original language	English
Title of host publication	IEEE 2008 Silicon Nanoelectronics Workshop, SNW 2008
DOIs	https://doi.org/10.1109/SNW.2008.5418389
State	Published - 2008
Event	IEEE 2008 Silicon Nanoelectronics Workshop, SNW 2008 - Honolulu, HI, United States Duration: 15 Jun 2008 → 16 Jun 2008

Publication series

Name	IEEE 2008 Silicon Nanoelectronics Workshop, SNW 2008

Conference

Conference	IEEE 2008 Silicon Nanoelectronics Workshop, SNW 2008
Country/Territory	United States
City	Honolulu, HI
Period	15/06/08 → 16/06/08

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10.1109/SNW.2008.5418389

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Kim, Y., Yun, J. G., Park, I. H., Cho, S., Lee, J. H., Park, S. H., Lee, D. H., Kim, D. H., Lee, G. S., Sim, W. B., Lee, J. D., & Park, B. G. (2008). Locally-separated vertical channel SONOS flash memory (LSVC SONOS) for multi-storage and multi-level operation. In IEEE 2008 Silicon Nanoelectronics Workshop, SNW 2008 Article 5418389 (IEEE 2008 Silicon Nanoelectronics Workshop, SNW 2008). https://doi.org/10.1109/SNW.2008.5418389

@inproceedings{74bac144153b47dcaaf9a2bad310ce3d,

title = "Locally-separated vertical channel SONOS flash memory (LSVC SONOS) for multi-storage and multi-level operation",

abstract = "A SONOS flash memory having locally-separated vertical channels is investigated. The vertical SONOS flash memory has a scaling issue related with the fin width. As the fin width is shorter, electrical interference between paired cells (PCI) is severer. To overcome PCI, we propose the locally-separated vertical channel SONOS (LSVC SONOS) structure. We demonstrate reliable operation of LSVC SONOS using ATLAS simulation. This device structure is promising for multi-storage and multi-level operation.",

author = "Yoon Kim and Yun, {Jang Gn} and Park, {Il Han} and Seongjae Cho and Lee, {Jung Hoon} and Park, {Se Hwan} and Lee, {Dong Hua} and Kim, {Doo Hyun} and Lee, {Gil Sung} and Sim, {Won Bo} and Lee, {Jong Duk} and Park, {Byung Gook}",

year = "2008",

doi = "10.1109/SNW.2008.5418389",

language = "English",

isbn = "9781424420711",

series = "IEEE 2008 Silicon Nanoelectronics Workshop, SNW 2008",

booktitle = "IEEE 2008 Silicon Nanoelectronics Workshop, SNW 2008",

note = "IEEE 2008 Silicon Nanoelectronics Workshop, SNW 2008 ; Conference date: 15-06-2008 Through 16-06-2008",

}

Kim, Y, Yun, JG, Park, IH, Cho, S, Lee, JH, Park, SH, Lee, DH, Kim, DH, Lee, GS, Sim, WB, Lee, JD & Park, BG 2008, Locally-separated vertical channel SONOS flash memory (LSVC SONOS) for multi-storage and multi-level operation. in IEEE 2008 Silicon Nanoelectronics Workshop, SNW 2008., 5418389, IEEE 2008 Silicon Nanoelectronics Workshop, SNW 2008, IEEE 2008 Silicon Nanoelectronics Workshop, SNW 2008, Honolulu, HI, United States, 15/06/08. https://doi.org/10.1109/SNW.2008.5418389

Locally-separated vertical channel SONOS flash memory (LSVC SONOS) for multi-storage and multi-level operation. / Kim, Yoon; Yun, Jang Gn; Park, Il Han et al.
IEEE 2008 Silicon Nanoelectronics Workshop, SNW 2008. 2008. 5418389 (IEEE 2008 Silicon Nanoelectronics Workshop, SNW 2008).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Locally-separated vertical channel SONOS flash memory (LSVC SONOS) for multi-storage and multi-level operation

AU - Kim, Yoon

AU - Yun, Jang Gn

AU - Park, Il Han

AU - Cho, Seongjae

AU - Lee, Jung Hoon

AU - Park, Se Hwan

AU - Lee, Dong Hua

AU - Kim, Doo Hyun

AU - Lee, Gil Sung

AU - Sim, Won Bo

AU - Lee, Jong Duk

AU - Park, Byung Gook

PY - 2008

Y1 - 2008

N2 - A SONOS flash memory having locally-separated vertical channels is investigated. The vertical SONOS flash memory has a scaling issue related with the fin width. As the fin width is shorter, electrical interference between paired cells (PCI) is severer. To overcome PCI, we propose the locally-separated vertical channel SONOS (LSVC SONOS) structure. We demonstrate reliable operation of LSVC SONOS using ATLAS simulation. This device structure is promising for multi-storage and multi-level operation.

AB - A SONOS flash memory having locally-separated vertical channels is investigated. The vertical SONOS flash memory has a scaling issue related with the fin width. As the fin width is shorter, electrical interference between paired cells (PCI) is severer. To overcome PCI, we propose the locally-separated vertical channel SONOS (LSVC SONOS) structure. We demonstrate reliable operation of LSVC SONOS using ATLAS simulation. This device structure is promising for multi-storage and multi-level operation.

UR - http://www.scopus.com/inward/record.url?scp=77949966272&partnerID=8YFLogxK

U2 - 10.1109/SNW.2008.5418389

DO - 10.1109/SNW.2008.5418389

M3 - Conference contribution

AN - SCOPUS:77949966272

SN - 9781424420711

T3 - IEEE 2008 Silicon Nanoelectronics Workshop, SNW 2008

BT - IEEE 2008 Silicon Nanoelectronics Workshop, SNW 2008

T2 - IEEE 2008 Silicon Nanoelectronics Workshop, SNW 2008

Y2 - 15 June 2008 through 16 June 2008

ER -

Locally-separated vertical channel SONOS flash memory (LSVC SONOS) for multi-storage and multi-level operation

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