Low temperature processes of poly-Si TFT backplane for flexible AM-OLEDs

Engineering

• Substrates 100%
• Thin-Film Transistor 100%
• Chemical Vapor Deposition 100%
• Low-Temperature 100%
• Nitride 100%
• Application 50%
• Room Temperature 50%
• Dielectrics 50%
• Deposition Process 50%
• Surface Morphology 50%
• Dehydrogenation 50%
• Refractive Index 50%
• Drives 50%

Material Science

• Temperature 100%
• Plastics 50%
• Thin-Film Transistor 50%
• Silicon 50%
• Chemical Vapor Deposition 50%
• Silicon Nitride 50%
• Permittivity 25%
• Laser 25%
• Surface Morphology 25%
• Amorphous Silicon 25%
• Adhesion 25%
• Dehydrogenation 25%
• Refractive Index 25%