Abstract
One of the most demanding challenges in next-generation thin-film transistors (TFTs) is the development of new materials for high-performance devices with higher speed and lower operation voltage. To drive a TFT at a low power, it is important to form an insulating layer as a thin film with good characteristics. Langmuir–Blodgett (LB) technique is one of the most suitable methods for controlling and developing two-dimensional nanomaterials. In the LB method, a layer only one molecule thick (Langmuir monolayer) is spread at the air/water interface and transferred onto the surface of a solid substrate and the process can be repeated several times with the same substrate to deposit multilayer films. In this study, a Ca 2 Nb 3 O 10 (CNO) dielectric layer was fabricated using the LB method, and a CdS active layer was fabricated using the chemical bath deposition (CBD) method to obtain the final structure of CdS-TFTs. CNO dielectric layers have low leakage current density (7.26 × 10 −7 A cm −2 ) and a high capacitance density of 944 nF cm −2 at 100 kHz. Therefore, it is considered that the CNO films produced using the LB method are suitable as an insulating layer material. Furthermore, the CdS-TFTs exhibited good performance with a low threshold voltage of 0.596 V, I on /I off current ratio of 10 6 , subthreshold slope of 0.05 V dec −1 , and high mobility of 0.428 cm 2 V −1 s −1 at operating voltages less than 2 V.
Original language | English |
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Pages (from-to) | 374-377 |
Number of pages | 4 |
Journal | Applied Surface Science |
Volume | 476 |
DOIs | |
State | Published - 15 May 2019 |
Keywords
- Ca Nb O nanosheets
- CdS active layer
- Low-voltage operating
- Thin-film transistor