Manufacturing of three-dimensional micro structure using proton beam

Seonggyu Lee, Won Tae Kwon

Research output: Contribution to journalArticlepeer-review


The diameter of a proton beam emanating from the MC-50 cyclotron is about 2-3 mm with Gaussian distribution. This widely irradiated proton beam is not suitable for semiconductor etching, precise positioning, and micromachining, which require a small spot. In this study, a beam cutting method using a microhole is proposed as an economical alternative. We produced a microhole with aspect ratio, average diameter, and thickness of 428, 21 μm, and 9 mm, respectively, for cutting the proton beam. By using this high-aspect-ratio microhole, we conducted machinability tests on microstructures with sizes of tens of μm. Additionally, the results of simulation using GEANT4 and those of the actual experiment were compared and analyzed. The outcome confirmed the possibility of implementing a micro process technology for the fabrication of three-dimensional microstructures of 20 micron units using the MC-50 cyclotron with the microhole.

Original languageEnglish
Pages (from-to)301-307
Number of pages7
JournalTransactions of the Korean Society of Mechanical Engineers, B
Issue number4
StatePublished - 2015


  • Extreme aspect ratio
  • Micro hole
  • Proton beam
  • Simulation


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