Memory characteristics improvement encouraged by the shape of narrow drain in cone SONOS memory structure

Gil Sung Lee, Il Han Park, Seongjae Cho, Jang Gn Yun, Jung Hoon Lee, Dong Hua Li, Doo Hyun Kim, Yoon Kim, Se Hwan Park, Won Bo Sim, Jong Duk Lee, Byung Gook Park

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We have proposed cone SONOS memory structure previously. The point of the structure is field concentration effect in two directions. Among the two, concentration of source to drain direction is critical in program operation. Simulation result shows the shape of narrow drain leads to great memory performance. Fabricated structure shows the same results. In this report, simplified program simulation result is presented and great injection characteristics is shown by comparison with cylinder structure.

Original languageEnglish
Title of host publicationIEEE 2008 Silicon Nanoelectronics Workshop, SNW 2008
DOIs
StatePublished - 2008
EventIEEE 2008 Silicon Nanoelectronics Workshop, SNW 2008 - Honolulu, HI, United States
Duration: 15 Jun 200816 Jun 2008

Publication series

NameIEEE 2008 Silicon Nanoelectronics Workshop, SNW 2008

Conference

ConferenceIEEE 2008 Silicon Nanoelectronics Workshop, SNW 2008
Country/TerritoryUnited States
CityHonolulu, HI
Period15/06/0816/06/08

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