Micromachined cavity resonator for millimeter-wave oscillator applications

Chungwoo Kim; Insang Song; Cimoo Song; Changyul Cheon; Youngwoo Kwon; Sukhan Lee

doi:10.1016/S0924-4247(00)00302-2

Micromachined cavity resonator for millimeter-wave oscillator applications

Chungwoo Kim, Insang Song, Cimoo Song, Changyul Cheon, Youngwoo Kwon, Sukhan Lee

School of Electrical and Computer Engineering

Research output: Contribution to journal › Conference article › peer-review

1 Scopus citations

Abstract

High stability and low phase noise oscillators are key components in millimeter-wave (MMW) systems. Using microelectromechanical system (MEMS) technology, the silicon cavity resonator has been developed for MMW oscillator applications. Thanks to the superior Q-factor of the cavity over planar resonators, low phase noise and high stability is expected. The fabricated, micromachined cavity showed an unloaded Q-factor of 120 and Ka-band voltage controlled oscillator (VCO) coupled with the cavity resonators showed a phase noise improvement of more than 15 dB over free-running oscillators (FROs). To the best of our knowledge, this is the first experimental demonstration of a high electron mobility transistor (HEMT) microwave monolithic integrated circuit (MMIC) oscillator combined with a micromachined cavity resonator.

Original language	English
Pages (from-to)	1-5
Number of pages	5
Journal	Sensors and Actuators A: Physical
Volume	83
Issue number	1
DOIs	https://doi.org/10.1016/S0924-4247(00)00302-2
State	Published - 22 May 2000
Event	The 10th International Conference on Solid-State Sensors and Actuators TRANSDUCERS '99 - Sendai, Jpn Duration: 7 Jun 1999 → 10 Jun 1999

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10.1016/S0924-4247(00)00302-2

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title = "Micromachined cavity resonator for millimeter-wave oscillator applications",

abstract = "High stability and low phase noise oscillators are key components in millimeter-wave (MMW) systems. Using microelectromechanical system (MEMS) technology, the silicon cavity resonator has been developed for MMW oscillator applications. Thanks to the superior Q-factor of the cavity over planar resonators, low phase noise and high stability is expected. The fabricated, micromachined cavity showed an unloaded Q-factor of 120 and Ka-band voltage controlled oscillator (VCO) coupled with the cavity resonators showed a phase noise improvement of more than 15 dB over free-running oscillators (FROs). To the best of our knowledge, this is the first experimental demonstration of a high electron mobility transistor (HEMT) microwave monolithic integrated circuit (MMIC) oscillator combined with a micromachined cavity resonator.",

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T1 - Micromachined cavity resonator for millimeter-wave oscillator applications

AU - Kim, Chungwoo

AU - Song, Insang

AU - Song, Cimoo

AU - Cheon, Changyul

AU - Kwon, Youngwoo

AU - Lee, Sukhan

PY - 2000/5/22

Y1 - 2000/5/22

N2 - High stability and low phase noise oscillators are key components in millimeter-wave (MMW) systems. Using microelectromechanical system (MEMS) technology, the silicon cavity resonator has been developed for MMW oscillator applications. Thanks to the superior Q-factor of the cavity over planar resonators, low phase noise and high stability is expected. The fabricated, micromachined cavity showed an unloaded Q-factor of 120 and Ka-band voltage controlled oscillator (VCO) coupled with the cavity resonators showed a phase noise improvement of more than 15 dB over free-running oscillators (FROs). To the best of our knowledge, this is the first experimental demonstration of a high electron mobility transistor (HEMT) microwave monolithic integrated circuit (MMIC) oscillator combined with a micromachined cavity resonator.

AB - High stability and low phase noise oscillators are key components in millimeter-wave (MMW) systems. Using microelectromechanical system (MEMS) technology, the silicon cavity resonator has been developed for MMW oscillator applications. Thanks to the superior Q-factor of the cavity over planar resonators, low phase noise and high stability is expected. The fabricated, micromachined cavity showed an unloaded Q-factor of 120 and Ka-band voltage controlled oscillator (VCO) coupled with the cavity resonators showed a phase noise improvement of more than 15 dB over free-running oscillators (FROs). To the best of our knowledge, this is the first experimental demonstration of a high electron mobility transistor (HEMT) microwave monolithic integrated circuit (MMIC) oscillator combined with a micromachined cavity resonator.

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U2 - 10.1016/S0924-4247(00)00302-2

DO - 10.1016/S0924-4247(00)00302-2

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T2 - The 10th International Conference on Solid-State Sensors and Actuators TRANSDUCERS '99

Y2 - 7 June 1999 through 10 June 1999

ER -

Micromachined cavity resonator for millimeter-wave oscillator applications

Abstract

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