Micromachined cavity resonator for millimeter-wave oscillator applications

Chungwoo Kim, Insang Song, Cimoo Song, Changyul Cheon, Youngwoo Kwon, Sukhan Lee

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations


High stability and low phase noise oscillators are key components in millimeter-wave (MMW) systems. Using microelectromechanical system (MEMS) technology, the silicon cavity resonator has been developed for MMW oscillator applications. Thanks to the superior Q-factor of the cavity over planar resonators, low phase noise and high stability is expected. The fabricated, micromachined cavity showed an unloaded Q-factor of 120 and Ka-band voltage controlled oscillator (VCO) coupled with the cavity resonators showed a phase noise improvement of more than 15 dB over free-running oscillators (FROs). To the best of our knowledge, this is the first experimental demonstration of a high electron mobility transistor (HEMT) microwave monolithic integrated circuit (MMIC) oscillator combined with a micromachined cavity resonator.

Original languageEnglish
Pages (from-to)1-5
Number of pages5
JournalSensors and Actuators A: Physical
Issue number1
StatePublished - 22 May 2000
EventThe 10th International Conference on Solid-State Sensors and Actuators TRANSDUCERS '99 - Sendai, Jpn
Duration: 7 Jun 199910 Jun 1999


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