Abstract
High stability and low phase noise oscillators are key components in millimeter-wave (MMW) systems. Using microelectromechanical system (MEMS) technology, the silicon cavity resonator has been developed for MMW oscillator applications. Thanks to the superior Q-factor of the cavity over planar resonators, low phase noise and high stability is expected. The fabricated, micromachined cavity showed an unloaded Q-factor of 120 and Ka-band voltage controlled oscillator (VCO) coupled with the cavity resonators showed a phase noise improvement of more than 15 dB over free-running oscillators (FROs). To the best of our knowledge, this is the first experimental demonstration of a high electron mobility transistor (HEMT) microwave monolithic integrated circuit (MMIC) oscillator combined with a micromachined cavity resonator.
| Original language | English |
|---|---|
| Pages (from-to) | 1-5 |
| Number of pages | 5 |
| Journal | Sensors and Actuators A: Physical |
| Volume | 83 |
| Issue number | 1 |
| DOIs | |
| State | Published - 22 May 2000 |
| Event | The 10th International Conference on Solid-State Sensors and Actuators TRANSDUCERS '99 - Sendai, Jpn Duration: 7 Jun 1999 → 10 Jun 1999 |
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