Micromachined planar probe using half-SIW and half-shielded stripline structure for permittivity measurement

Yong Seung Bang, Namgon Kim, Jung Mu Kim, Changyul Cheon, Youngwoo Kwon, Yong Kweon Kim

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

This paper reports on a micromachined planar type probe based on a novel hybrid shielded stripline. The proposed structure is for a broadband transverse electromagnetic (TEM) single-mode propagation using substrate integrated waveguide (SIW) and conventional shielded stripline. We suggested a novel probe structure that composed of half-SIW and half-shielded stripline, which combined through a benzocyclobutene (BCB) bonding layer. The structural concept and simple fabrication method has been introduced, and the S11 in air was measured from 0.5 GHz to 30 GHz. The permittivity measurement of 0.9 % saline has been performed to validate the proposed structure at frequencies from 0.5 GHz to 20 GHz.

Original languageEnglish
Title of host publication2010 10th IEEE Conference on Nanotechnology, NANO 2010
Pages1121-1124
Number of pages4
DOIs
StatePublished - 2010
Event2010 10th IEEE Conference on Nanotechnology, NANO 2010 - Ilsan, Gyeonggi-Do, Korea, Republic of
Duration: 17 Aug 201020 Aug 2010

Publication series

Name2010 10th IEEE Conference on Nanotechnology, NANO 2010

Conference

Conference2010 10th IEEE Conference on Nanotechnology, NANO 2010
Country/TerritoryKorea, Republic of
CityIlsan, Gyeonggi-Do
Period17/08/1020/08/10

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