Microstrip gas chambers on glass and ceramic substrates

W. G. Gong, H. Wieman, J. W. Harris, J. T. Mitchell, W. S. Hong, V. Perez-Mendez

Research output: Contribution to journalArticlepeer-review

5 Scopus citations


We report developments of Microstrip Gas Chambers (MSGC) fabricated on glass and ceramic substrates with various resistivities. Low resistivity of the substrate is found to be critical for achieving stable operation of microstrip gas chambers. The microstrip pattern consists of 10 µm wide anodes and 90 µm wide cathodes with a 200 µm anode-to-anode pitch. High-quality microstrips are fabricated using the dry etch after UV-photolithography. Our chambers are tested in an Ar(90)-CH4(10) gas mixture at atmospheric pressure with a 100 µCi55Fe source. An energy resolution (FWHM) of 15% has been achieved for 6 keV soft Xrays. At a rate of 5×104 photons/sec/mm2, gas gains are stable within a few percent.

Original languageEnglish
Pages (from-to)890-897
Number of pages8
JournalIEEE Transactions on Nuclear Science
Issue number4
StatePublished - Aug 1994


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