Microstructure and electrical properties of high power laser thermal annealing on inkjet-printed Ag films

Yo Han Yoon, Seol Min Yi, Jung Ryoul Yim, Ji Hoon Lee, George Rozgonyi, Young Chang Joo

Research output: Contribution to journalArticlepeer-review

29 Scopus citations

Abstract

In this work, a high power continuous-wave (CW) Nd:YAG laser was used for thermal treatment of inkjet-printed Ag films - resulting in the elimination of organic additives (dispersant, binder, and organic solvent) in the Ag ink and annealing of Ag nano-particles. By optimizing laser parameters such as laser power and defocusing value, the laser energy can be totally converted into heat energy, which is used for thermal treatment of inkjet-printed Ag films. This results in the microstructure and the resistivity of the films to be controlled. We investigated the thermal diffusion mechanisms during laser annealing and the resulting microstructures. The impact of high power laser annealing on microstructures and electrical characteristics of inkjet-printed Ag films was compared to those of the films annealed by a conventional furnace annealing. Focused ion beam (FIB) channeling images show that the laser annealed Ag films have large columnar grains and a dense void-free structure, while furnace annealed films have much smaller grains and exhibit void formation. As a result, the laser annealed films have better electrical properties (low resistivity) compared to furnace annealed samples.

Original languageEnglish
Pages (from-to)2230-2233
Number of pages4
JournalMicroelectronic Engineering
Volume87
Issue number11
DOIs
StatePublished - Nov 2010

Keywords

  • CW Nd:YAG laser
  • Furnace annealing
  • Inkjet printing
  • Resistivity
  • Thermal diffusion

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