Monolithic RF MEMS probe array system using RF MEMS SP3T switches for permittivity measurement

Jung Mu Kim; Namgon Kim; Jae Hyoung Park; Changyul Cheon; Youngwoo Kwon; Yong Kweon Kim

doi:10.1109/SENSOR.2007.4300217

Monolithic RF MEMS probe array system using RF MEMS SP3T switches for permittivity measurement

Jung Mu Kim, Namgon Kim, Jae Hyoung Park, Changyul Cheon, Youngwoo Kwon, Yong Kweon Kim

School of Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

The monolithic RF MEMS probe array system for the application of permittivity measurement was firstly proposed and implemented. The proposed system consists of RF MEMS probe array and RF MEMS SP3T(single-pole triple-throw) switches. We succeeded to show the feasibility of the system for the permittivity measurement experimentally through the permittivity measurement of liquid as operating RF MEMS switches in turn.

Original language	English
Title of host publication	TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages	663-666
Number of pages	4
DOIs	https://doi.org/10.1109/SENSOR.2007.4300217
State	Published - 2007
Event	4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France Duration: 10 Jun 2007 → 14 Jun 2007

Publication series

Name	TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference

Conference	4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
Country/Territory	France
City	Lyon
Period	10/06/07 → 14/06/07

Keywords

Permittivity measurement
RF MEMS probe system
RF MEMS switch

Access to Document

10.1109/SENSOR.2007.4300217

Cite this

Kim, J. M., Kim, N., Park, J. H., Cheon, C., Kwon, Y., & Kim, Y. K. (2007). Monolithic RF MEMS probe array system using RF MEMS SP3T switches for permittivity measurement. In TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 663-666). Article 4300217 (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2007.4300217

Kim, Jung Mu ; Kim, Namgon ; Park, Jae Hyoung et al. / Monolithic RF MEMS probe array system using RF MEMS SP3T switches for permittivity measurement. TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. pp. 663-666 (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems).

@inproceedings{eb16a6f5d9e64ac3a11bd81ed03e76a8,

title = "Monolithic RF MEMS probe array system using RF MEMS SP3T switches for permittivity measurement",

abstract = "The monolithic RF MEMS probe array system for the application of permittivity measurement was firstly proposed and implemented. The proposed system consists of RF MEMS probe array and RF MEMS SP3T(single-pole triple-throw) switches. We succeeded to show the feasibility of the system for the permittivity measurement experimentally through the permittivity measurement of liquid as operating RF MEMS switches in turn.",

keywords = "Permittivity measurement, RF MEMS probe system, RF MEMS switch",

author = "Kim, {Jung Mu} and Namgon Kim and Park, {Jae Hyoung} and Changyul Cheon and Youngwoo Kwon and Kim, {Yong Kweon}",

year = "2007",

doi = "10.1109/SENSOR.2007.4300217",

language = "English",

isbn = "1424408423",

series = "TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems",

pages = "663--666",

booktitle = "TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems",

note = "4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 ; Conference date: 10-06-2007 Through 14-06-2007",

}

Kim, JM, Kim, N, Park, JH, Cheon, C, Kwon, Y & Kim, YK 2007, Monolithic RF MEMS probe array system using RF MEMS SP3T switches for permittivity measurement. in TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems., 4300217, TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems, pp. 663-666, 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07, Lyon, France, 10/06/07. https://doi.org/10.1109/SENSOR.2007.4300217

Monolithic RF MEMS probe array system using RF MEMS SP3T switches for permittivity measurement. / Kim, Jung Mu; Kim, Namgon; Park, Jae Hyoung et al.
TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 663-666 4300217 (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Monolithic RF MEMS probe array system using RF MEMS SP3T switches for permittivity measurement

AU - Kim, Jung Mu

AU - Kim, Namgon

AU - Park, Jae Hyoung

AU - Cheon, Changyul

AU - Kwon, Youngwoo

AU - Kim, Yong Kweon

PY - 2007

Y1 - 2007

N2 - The monolithic RF MEMS probe array system for the application of permittivity measurement was firstly proposed and implemented. The proposed system consists of RF MEMS probe array and RF MEMS SP3T(single-pole triple-throw) switches. We succeeded to show the feasibility of the system for the permittivity measurement experimentally through the permittivity measurement of liquid as operating RF MEMS switches in turn.

AB - The monolithic RF MEMS probe array system for the application of permittivity measurement was firstly proposed and implemented. The proposed system consists of RF MEMS probe array and RF MEMS SP3T(single-pole triple-throw) switches. We succeeded to show the feasibility of the system for the permittivity measurement experimentally through the permittivity measurement of liquid as operating RF MEMS switches in turn.

KW - Permittivity measurement

KW - RF MEMS probe system

KW - RF MEMS switch

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DO - 10.1109/SENSOR.2007.4300217

M3 - Conference contribution

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Y2 - 10 June 2007 through 14 June 2007

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Kim JM, Kim N, Park JH, Cheon C, Kwon Y, Kim YK. Monolithic RF MEMS probe array system using RF MEMS SP3T switches for permittivity measurement. In TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 663-666. 4300217. (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems). doi: 10.1109/SENSOR.2007.4300217

Monolithic RF MEMS probe array system using RF MEMS SP3T switches for permittivity measurement

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