Multi-layer processed probes for permittivity measurement

Eum Min Jeong, Geunseok Jeong, Jung Mu Kim, Jae Hyoung Park, Jei Won Cho, Changyul Cheon, Yong Kweon Kim, Youngwoo Kwon

Research output: Contribution to journalConference articlepeer-review

5 Scopus citations


Probes fabricated using multi-layer process are proposed for complex permittivity measurements in microwavef frequency range, For multi-layer processing, we have considered LTCC(Low Temperature Co-fired Ceramic) and MEMS(Micro-Electro-Mechanical-Systems) processes to make the probe smaller and thus to be applicable to small biological tissues. We expect the probe size can be reduced to 0.1mm by 0.2mm if necessary. We also investigate the shielding effect of vias that is normally used to support TEM wave inside the planar transmission line structure. The complex permittivity of 0.9% saline in microwave frequency range(100MHz-40GHz) was measured using MEMS and LTCC preise to verify the usefulness of the proposed probes.

Original languageEnglish
Pages (from-to)1813-1816
Number of pages4
JournalIEEE MTT-S International Microwave Symposium Digest
StatePublished - 2004
Event2004 IEEE MITT-S International Microwave Symposium Digest - Fort Worth, TX, United States
Duration: 6 Jun 200411 Jun 2004


  • LTCC probe
  • MEMS probe
  • Permittivity measurement
  • Permittivity of biological tissues


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