@inproceedings{e4b7513ddf46489786f96eae2a5acb08,
title = "Multilayer thin film deposition of Pd/Ag alloy as an application for hydrogen sensing",
abstract = "A highly sensitive H2 gas sensor was fabricated using a microelectromechanical system (MEMS) procedure having an embedded micro-heater. The palladium-silver (Pd/Ag having stoichiometric ratios 77:23) thin film was deposited by the RF/DC magnetron sputtering and used as the hydrogen sensing layer designed as a zig-zag pattern. The working temperature of the micro heater showed a linear relation with variations of the heater voltage. The electrothermal properties of the H2 sensor were studied by finite element method (FEM). The sensing properties of the fabricated H2 sensor as the change of electrical resistance were studied with respect to hydrogen concentration and temperature. Experimental results showed high sensitivity and response time after application of the heater voltage. The sensing properties of the alloyed Pd/Ag thin film were more improved than those of pure palladium. The maximum sensitivity (Rs) of the fabricated H2 sensor was 14.26% for 1000 ppm H2. The gas sensitivity of the fabricated H2 sensor showed linear behavior with the heater voltage (operating temperature) and positively corresponded with the hydrogen concentration.",
keywords = "MEMS, Pd/Ag, hydrogen sensors, microheater, sensitivity",
author = "Bharat Sharma and Yadav, {Hemraj M.} and Kim, {Jung Sik}",
note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 12th IEEE Sensors Applications Symposium, SAS 2017 ; Conference date: 13-03-2017 Through 15-03-2017",
year = "2017",
month = apr,
day = "6",
doi = "10.1109/SAS.2017.7894072",
language = "English",
series = "SAS 2017 - 2017 IEEE Sensors Applications Symposium, Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "SAS 2017 - 2017 IEEE Sensors Applications Symposium, Proceedings",
address = "United States",
}