Nano Mold Lithography for 40-nm Patterns
- C. M. Park
- , B. H. Cho
- , C. K. Hyon
- , S. W. Hwang
- , D. Ahn
- , E. K. Kim
- Korea University
- University of Seoul
- Korea Institute of Science and Technology
Research output: Contribution to journal › Article › peer-review
4
Scopus
citations