Nano-structure fabrication and manipulation by the cantilever oscillation of an atomic force microscope

Chan Kyeong Hyon; Seung Chul Choi; Sung Woo Hwang; Doyeol Ahn; Yong Kim; Eun Kyu Kim

doi:10.1143/jjap.38.7257

Nano-structure fabrication and manipulation by the cantilever oscillation of an atomic force microscope

Chan Kyeong Hyon, Seung Chul Choi, Sung Woo Hwang, Doyeol Ahn, Yong Kim, Eun Kyu Kim

School of Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

12 Scopus citations

Abstract

Nanometer scale mechanical processing of semi-insulating GaAs surface was performed using a cantilever oscillating atomic force microscope. Oscillating probe tips induce bond breaking of the GaAs surface and generate nano-meter size patterns. The size of the pattern is shown to be fully controlled by the amplitude and the frequency of the external modulation voltage to the piezo-scanner.

Original language	English
Pages (from-to)	7257-7259
Number of pages	3
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	38
Issue number	12 B
DOIs	https://doi.org/10.1143/jjap.38.7257
State	Published - 1999

Keywords

AFM
Cantilever oscillation
Nano-structure
Scanning probe lithography
Voltage modulation

Access to Document

10.1143/jjap.38.7257

Cite this

@article{7e1bd7aa7d8a4625b07f496a140ce040,

title = "Nano-structure fabrication and manipulation by the cantilever oscillation of an atomic force microscope",

abstract = "Nanometer scale mechanical processing of semi-insulating GaAs surface was performed using a cantilever oscillating atomic force microscope. Oscillating probe tips induce bond breaking of the GaAs surface and generate nano-meter size patterns. The size of the pattern is shown to be fully controlled by the amplitude and the frequency of the external modulation voltage to the piezo-scanner.",

keywords = "AFM, Cantilever oscillation, Nano-structure, Scanning probe lithography, Voltage modulation",

author = "Hyon, {Chan Kyeong} and Choi, {Seung Chul} and Hwang, {Sung Woo} and Doyeol Ahn and Yong Kim and Kim, {Eun Kyu}",

year = "1999",

doi = "10.1143/jjap.38.7257",

language = "English",

volume = "38",

pages = "7257--7259",

journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers",

issn = "0021-4922",

publisher = "Japan Society of Applied Physics",

number = "12 B",

}

Nano-structure fabrication and manipulation by the cantilever oscillation of an atomic force microscope. / Hyon, Chan Kyeong; Choi, Seung Chul; Hwang, Sung Woo et al.
In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 38, No. 12 B, 1999, p. 7257-7259.

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - Nano-structure fabrication and manipulation by the cantilever oscillation of an atomic force microscope

AU - Hyon, Chan Kyeong

AU - Choi, Seung Chul

AU - Hwang, Sung Woo

AU - Ahn, Doyeol

AU - Kim, Yong

AU - Kim, Eun Kyu

PY - 1999

Y1 - 1999

N2 - Nanometer scale mechanical processing of semi-insulating GaAs surface was performed using a cantilever oscillating atomic force microscope. Oscillating probe tips induce bond breaking of the GaAs surface and generate nano-meter size patterns. The size of the pattern is shown to be fully controlled by the amplitude and the frequency of the external modulation voltage to the piezo-scanner.

AB - Nanometer scale mechanical processing of semi-insulating GaAs surface was performed using a cantilever oscillating atomic force microscope. Oscillating probe tips induce bond breaking of the GaAs surface and generate nano-meter size patterns. The size of the pattern is shown to be fully controlled by the amplitude and the frequency of the external modulation voltage to the piezo-scanner.

KW - AFM

KW - Cantilever oscillation

KW - Nano-structure

KW - Scanning probe lithography

KW - Voltage modulation

UR - http://www.scopus.com/inward/record.url?scp=0033315311&partnerID=8YFLogxK

U2 - 10.1143/jjap.38.7257

DO - 10.1143/jjap.38.7257

M3 - Article

AN - SCOPUS:0033315311

SN - 0021-4922

VL - 38

SP - 7257

EP - 7259

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

IS - 12 B

ER -

Nano-structure fabrication and manipulation by the cantilever oscillation of an atomic force microscope

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this