Nano-structure fabrication and manipulation by the cantilever oscillation of an atomic force microscope

Chan Kyeong Hyon; Seung Chul Choi; Sung Woo Hwang; Doyeol Ahn; Yong Kim; Eun Kyu Kim

doi:10.1143/jjap.38.7257

Nano-structure fabrication and manipulation by the cantilever oscillation of an atomic force microscope

Chan Kyeong Hyon
, Seung Chul Choi
, Sung Woo Hwang
, Doyeol Ahn
, Yong Kim
, Eun Kyu Kim

School of Electrical and Computer Engineering

Korea University
University of Seoul
Korea Institute of Science and Technology

Research output: Contribution to journal › Article › peer-review

13 Scopus citations

Abstract

Nanometer scale mechanical processing of semi-insulating GaAs surface was performed using a cantilever oscillating atomic force microscope. Oscillating probe tips induce bond breaking of the GaAs surface and generate nano-meter size patterns. The size of the pattern is shown to be fully controlled by the amplitude and the frequency of the external modulation voltage to the piezo-scanner.

Original language	English
Pages (from-to)	7257-7259
Number of pages	3
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	38
Issue number	12 B
DOIs	https://doi.org/10.1143/jjap.38.7257
State	Published - 1999

Keywords

AFM
Cantilever oscillation
Nano-structure
Scanning probe lithography
Voltage modulation

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10.1143/jjap.38.7257

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title = "Nano-structure fabrication and manipulation by the cantilever oscillation of an atomic force microscope",

abstract = "Nanometer scale mechanical processing of semi-insulating GaAs surface was performed using a cantilever oscillating atomic force microscope. Oscillating probe tips induce bond breaking of the GaAs surface and generate nano-meter size patterns. The size of the pattern is shown to be fully controlled by the amplitude and the frequency of the external modulation voltage to the piezo-scanner.",

keywords = "AFM, Cantilever oscillation, Nano-structure, Scanning probe lithography, Voltage modulation",

author = "Hyon, \{Chan Kyeong\} and Choi, \{Seung Chul\} and Hwang, \{Sung Woo\} and Doyeol Ahn and Yong Kim and Kim, \{Eun Kyu\}",

year = "1999",

doi = "10.1143/jjap.38.7257",

language = "English",

volume = "38",

pages = "7257--7259",

journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers",

issn = "0021-4922",

publisher = "Institute of Physics",

number = "12 B",

}

Nano-structure fabrication and manipulation by the cantilever oscillation of an atomic force microscope. / Hyon, Chan Kyeong; Choi, Seung Chul; Hwang, Sung Woo et al.
In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 38, No. 12 B, 1999, p. 7257-7259.

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - Nano-structure fabrication and manipulation by the cantilever oscillation of an atomic force microscope

AU - Hyon, Chan Kyeong

AU - Choi, Seung Chul

AU - Hwang, Sung Woo

AU - Ahn, Doyeol

AU - Kim, Yong

AU - Kim, Eun Kyu

PY - 1999

Y1 - 1999

N2 - Nanometer scale mechanical processing of semi-insulating GaAs surface was performed using a cantilever oscillating atomic force microscope. Oscillating probe tips induce bond breaking of the GaAs surface and generate nano-meter size patterns. The size of the pattern is shown to be fully controlled by the amplitude and the frequency of the external modulation voltage to the piezo-scanner.

AB - Nanometer scale mechanical processing of semi-insulating GaAs surface was performed using a cantilever oscillating atomic force microscope. Oscillating probe tips induce bond breaking of the GaAs surface and generate nano-meter size patterns. The size of the pattern is shown to be fully controlled by the amplitude and the frequency of the external modulation voltage to the piezo-scanner.

KW - AFM

KW - Cantilever oscillation

KW - Nano-structure

KW - Scanning probe lithography

KW - Voltage modulation

UR - https://www.scopus.com/pages/publications/0033315311

U2 - 10.1143/jjap.38.7257

DO - 10.1143/jjap.38.7257

M3 - Article

AN - SCOPUS:0033315311

SN - 0021-4922

VL - 38

SP - 7257

EP - 7259

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

IS - 12 B

ER -

Nano-structure fabrication and manipulation by the cantilever oscillation of an atomic force microscope

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Keywords

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