@inproceedings{79f3f9e444ec48ec8ad0e6a1e22a8fe8,
title = "Nanofabrication of quantum dots on InP by In-situ etching and selective growth",
abstract = "Diblock copolymer lithography followed by selective growth is used for the nanofabrication of InGaAs quantum dots (QDs) on InP substrate. Stronger photoluminescence intensity is observed when in-situ CBr4 etching is employed prior to QD growth.",
author = "Y. Huang and T. Kim and T. Garrod and Mawst, {L. J.} and S. Xiong and Nealey, {P. F.} and K. Schulte and Kuech, {T. F.}",
year = "2012",
doi = "10.1364/cleo_si.2012.ctu2j.8",
language = "English",
isbn = "9781557529435",
series = "CLEO: Science and Innovations, CLEO_SI 2012",
publisher = "Optical Society of America (OSA)",
pages = "CTu2J.8",
booktitle = "CLEO",
note = "CLEO: Science and Innovations, CLEO_SI 2012 ; Conference date: 06-05-2012 Through 11-05-2012",
}