@inproceedings{dd9d6265bdf54c1596f55c451a16ea06,
title = "Nanofabrication of quantum dots on InP by in-situ etching and selective growth",
abstract = "Diblock copolymer lithography followed by selective growth is used for the nanofabrication of InGaAs quantum dots (QDs) on InP substrate. Stronger photoluminescence intensity is observed when in-situ CBr4 etching is employed prior to QD growth.",
author = "Y. Huang and T. Kim and T. Garrod and Mawst, \{L. J.\} and S. Xiong and Nealey, \{P. F.\} and K. Schulte and Kuech, \{T. F.\}",
year = "2012",
language = "English",
isbn = "9781467318396",
series = "2012 Conference on Lasers and Electro-Optics, CLEO 2012",
booktitle = "2012 Conference on Lasers and Electro-Optics, CLEO 2012",
note = "2012 Conference on Lasers and Electro-Optics, CLEO 2012 ; Conference date: 06-05-2012 Through 11-05-2012",
}