Novel MMIC protection technique in plasma etching process for mechanically movable RF mems antenna

Jung Mu Kim, Sanghyo Lee, Yongsung Kim, Jong Man Kim, Changyul Cheon, Youngwoo Kwon, Yong Kweon Kim

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'Novel MMIC protection technique in plasma etching process for mechanically movable RF mems antenna'. Together they form a unique fingerprint.

Engineering

Computer Science

Material Science