Observation of AlOx material in electrical resistive switching for nonvolatile random access memory application

Kyun Ho Jung, Seung Gon Song, Kyoung Wan Park, Jung Hyun Sok, Kyong Min Kim, Yun Sun Park

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Abstract

We fabricated an Al / AlOx / Al device by using a RF magnetron sputter system. The device showed a unipolar resistive switching process. In this study, the switching mechanism of the device followed the conductive filament model. The conduction mechanisms for the conductive filament model were explained by using Ohmic conduction for the low resistance state (LRS) and Schottky emission for the high resistance state (HRS). The average value of the resistance ratio between the HRS and the LRS was about 3.48 × 107 when the reading voltage (0.1 V) was achieved. The electrical property of the endurance was achieved under 50 switching cycles. A low switching voltage could be obtained for a low power consuming device. These results proved that the AlOx material has various possibilities for use in nonvolatile random access memory applications.

Original languageEnglish
Pages (from-to)489-493
Number of pages5
JournalJournal of the Korean Physical Society
Volume70
Issue number5
DOIs
StatePublished - 1 Mar 2017

Keywords

  • AlO
  • Conductive filament model
  • Nonvolatile resistive random access memory
  • Unipolar resistive switching

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