@inproceedings{b93b41a75555412c8fcc0bf0e077922a,
title = "Optical sensitivity of P-I-N diodes using silicon nano-clusters embedded in silicon rich silicon nitride films",
abstract = "We have investigated the optical sensitivity on electrical properties of silicon-rich silicon nitride films for photo sensor application. The silicon-rich silicon nitride films were prepared by catalytic chemical vapor deposition technique at substrate temperature below 200 °C. Silicon nano-clusters inside there films were observed by measurement of transmission electron microscope. P-i-n diodes were fabricated by using p-type silicon wafer, intrinsic silicon-rich silicon nitride films, and n-type silicon films. Photo/dark currents of the p-i-n diodes were measured at reverse bias. Photo/dark current ratios were controlled by variation of mixture ratios in source gas of the intrinsic silicon-rich silicon nitride films.",
keywords = "Low temperature process, Silicon based photo sensor, Silicon nanocrystals",
author = "Lee, {Kyoung Min} and Hwang, {Jae Dam} and Lee, {Youn Jin} and No, {Kil Sun} and Keum, {Ki Su} and Hong, {Wan Shick}",
year = "2010",
language = "English",
isbn = "9781617827020",
series = "Proceedings of International Meeting on Information Display",
pages = "836--837",
booktitle = "10th International Meeting on Information Display and International Display Manufacturing Conference and Asia Display 2010, IMID/IDMC/ASIA Display 2010",
note = "10th International Meeting on Information Display and International Display Manufacturing Conference and Asia Display 2010, IMID/IDMC/ASIA Display 2010 ; Conference date: 11-10-2010 Through 15-10-2010",
}