Optimizing high harmonic generation in hollow-core gas cell considering variation of gas density

Yong Soo Kim; Byunghyuck Moon; Chulki Kim; Byeong kwon Ju; Ju Han Lee; Young Min Jhon

doi:10.1016/j.optlastec.2021.107803

Optimizing high harmonic generation in hollow-core gas cell considering variation of gas density

Yong Soo Kim, Byunghyuck Moon, Chulki Kim, Byeong kwon Ju, Ju Han Lee, Young Min Jhon

School of Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

We have developed a coherent and compact extreme-ultraviolet light source based on phase-matched high harmonic generation by using a hollow-core gas cell that can be easily aligned and maintain long stability. The gas cell consists of three bodies to minimize gas leakage and maintain stable vacuum. The photon flux was calculated considering the dependence of the gas number density and the pressure on the radii of the hollow core and the hole in the Al plates on both sides of the gas cell, which showed good coincidence with the experimental values. The photon flux is 2 × 10¹⁰ photons s⁻¹ near 13.5 nm (91.5 eV) within 10 nm bandwidth. Also, the compact extreme-ultraviolet light source is found to operate stably for hours, which is suitable for practical applications such as metrology and inspection for extreme-ultraviolet mask, spectroscopy, holography, microscopy, etc.

Original language	English
Article number	107803
Journal	Optics and Laser Technology
Volume	149
DOIs	https://doi.org/10.1016/j.optlastec.2021.107803
State	Published - May 2022

Keywords

Coherent soft x-ray
Extreme-ultraviolet
High harmonic generation
Phase-matching

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10.1016/j.optlastec.2021.107803

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@article{3a34ed850ac742e581623156b0e69e81,

title = "Optimizing high harmonic generation in hollow-core gas cell considering variation of gas density",

abstract = "We have developed a coherent and compact extreme-ultraviolet light source based on phase-matched high harmonic generation by using a hollow-core gas cell that can be easily aligned and maintain long stability. The gas cell consists of three bodies to minimize gas leakage and maintain stable vacuum. The photon flux was calculated considering the dependence of the gas number density and the pressure on the radii of the hollow core and the hole in the Al plates on both sides of the gas cell, which showed good coincidence with the experimental values. The photon flux is 2 × 1010 photons s−1 near 13.5 nm (91.5 eV) within 10 nm bandwidth. Also, the compact extreme-ultraviolet light source is found to operate stably for hours, which is suitable for practical applications such as metrology and inspection for extreme-ultraviolet mask, spectroscopy, holography, microscopy, etc.",

keywords = "Coherent soft x-ray, Extreme-ultraviolet, High harmonic generation, Phase-matching",

author = "Kim, {Yong Soo} and Byunghyuck Moon and Chulki Kim and Ju, {Byeong kwon} and Lee, {Ju Han} and Jhon, {Young Min}",

note = "Publisher Copyright: {\textcopyright} 2021",

year = "2022",

month = may,

doi = "10.1016/j.optlastec.2021.107803",

language = "English",

volume = "149",

journal = "Optics and Laser Technology",

issn = "0030-3992",

publisher = "Elsevier Ltd.",

}

TY - JOUR

T1 - Optimizing high harmonic generation in hollow-core gas cell considering variation of gas density

AU - Kim, Yong Soo

AU - Moon, Byunghyuck

AU - Kim, Chulki

AU - Ju, Byeong kwon

AU - Lee, Ju Han

AU - Jhon, Young Min

PY - 2022/5

Y1 - 2022/5

N2 - We have developed a coherent and compact extreme-ultraviolet light source based on phase-matched high harmonic generation by using a hollow-core gas cell that can be easily aligned and maintain long stability. The gas cell consists of three bodies to minimize gas leakage and maintain stable vacuum. The photon flux was calculated considering the dependence of the gas number density and the pressure on the radii of the hollow core and the hole in the Al plates on both sides of the gas cell, which showed good coincidence with the experimental values. The photon flux is 2 × 1010 photons s−1 near 13.5 nm (91.5 eV) within 10 nm bandwidth. Also, the compact extreme-ultraviolet light source is found to operate stably for hours, which is suitable for practical applications such as metrology and inspection for extreme-ultraviolet mask, spectroscopy, holography, microscopy, etc.

AB - We have developed a coherent and compact extreme-ultraviolet light source based on phase-matched high harmonic generation by using a hollow-core gas cell that can be easily aligned and maintain long stability. The gas cell consists of three bodies to minimize gas leakage and maintain stable vacuum. The photon flux was calculated considering the dependence of the gas number density and the pressure on the radii of the hollow core and the hole in the Al plates on both sides of the gas cell, which showed good coincidence with the experimental values. The photon flux is 2 × 1010 photons s−1 near 13.5 nm (91.5 eV) within 10 nm bandwidth. Also, the compact extreme-ultraviolet light source is found to operate stably for hours, which is suitable for practical applications such as metrology and inspection for extreme-ultraviolet mask, spectroscopy, holography, microscopy, etc.

KW - Coherent soft x-ray

KW - Extreme-ultraviolet

KW - High harmonic generation

KW - Phase-matching

UR - http://www.scopus.com/inward/record.url?scp=85121461033&partnerID=8YFLogxK

U2 - 10.1016/j.optlastec.2021.107803

DO - 10.1016/j.optlastec.2021.107803

M3 - Article

AN - SCOPUS:85121461033

SN - 0030-3992

VL - 149

JO - Optics and Laser Technology

JF - Optics and Laser Technology

M1 - 107803

ER -

Optimizing high harmonic generation in hollow-core gas cell considering variation of gas density

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Keywords

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