Orientation control of (Bi,La)4Ti3O12 thin films derived by sol-gel method

B. E. Park, C. J. Kim, H. Ishiwara

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1 Scopus citations


BLT ((Bi,La)4Ti3O12) thin films with (117)- and (001)-preferred orientation were fabricated on Pt/Ti/SiO 2/Si(100) substrates by a sol-gel method. Films were annealed in O2 ambient at 750°C for 30 min to crystallize material. In this crystallization process, the temperature heating rate was changed from 0.5°C/sec to 3000°C/sec. It was shown from XRD and XRD reciprocal space mappings analyses that the BLT films with (117)-preferred orientation were formed at lower temperature rate, while the films with c-axis preferred orientation were formed at higher healing rate. The remanent polarization (2Pr) values of the BLT films with (117)- and (001)-preferred orientation were 36 and 10 μC/cm2, respectively. SEM showed that the (117)-oriented BLT films are composed of peg-like small grains. On the other hand, large platelet-like grains were found in (001)-oriented BLT films.

Original languageEnglish
Pages (from-to)67-73
Number of pages7
StatePublished - 2005


  • (Bi,La)TiO
  • FeRAM
  • Orientation
  • Sol-gel
  • Thin film


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