Photoconductivity in silicon rich silicon nitride films containing silicon nanocrystals prepared by catalytic CVD

Kyoung Min Lee; Jae Dam Hwang; Yeon Jin Lee; Ki Su Kuem; Kil Sun No; Kap Soo Yoon; Sung Hoon Yang; Wan Shick Hong

Photoconductivity in silicon rich silicon nitride films containing silicon nanocrystals prepared by catalytic CVD

Kyoung Min Lee, Jae Dam Hwang, Yeon Jin Lee, Ki Su Kuem, Kil Sun No, Kap Soo Yoon, Sung Hoon Yang, Wan Shick Hong

Department of Materials Science and Engineering

Research output: Contribution to conference › Paper › peer-review

Abstract

We fabricated metal-insulator-semiconductor (MIS) capacitors and p-i-n diodes using silicon rich silicon nitride (SRSN) film containing silicon nanocrystals (Si NCs) prepared by catalytic chemical vapor deposition (Cat-CVD). Photo/dark current difference and photo/dark hysterisis appeared in the current-voltage (I-V) and the capacitance-voltage (C-V) curves, respectively.

Original language	English
Pages	533-534
Number of pages	2
State	Published - 2010
Event	17th International Display Workshops, IDW'10 - Fukuoka, Japan Duration: 1 Dec 2010 → 3 Dec 2010

Conference

Conference	17th International Display Workshops, IDW'10
Country/Territory	Japan
City	Fukuoka
Period	1/12/10 → 3/12/10

Cite this

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title = "Photoconductivity in silicon rich silicon nitride films containing silicon nanocrystals prepared by catalytic CVD",

abstract = "We fabricated metal-insulator-semiconductor (MIS) capacitors and p-i-n diodes using silicon rich silicon nitride (SRSN) film containing silicon nanocrystals (Si NCs) prepared by catalytic chemical vapor deposition (Cat-CVD). Photo/dark current difference and photo/dark hysterisis appeared in the current-voltage (I-V) and the capacitance-voltage (C-V) curves, respectively.",

author = "Lee, {Kyoung Min} and Hwang, {Jae Dam} and Lee, {Yeon Jin} and Kuem, {Ki Su} and No, {Kil Sun} and Yoon, {Kap Soo} and Yang, {Sung Hoon} and Hong, {Wan Shick}",

year = "2010",

language = "English",

pages = "533--534",

note = "17th International Display Workshops, IDW'10 ; Conference date: 01-12-2010 Through 03-12-2010",

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TY - CONF

T1 - Photoconductivity in silicon rich silicon nitride films containing silicon nanocrystals prepared by catalytic CVD

AU - Lee, Kyoung Min

AU - Hwang, Jae Dam

AU - Lee, Yeon Jin

AU - Kuem, Ki Su

AU - No, Kil Sun

AU - Yoon, Kap Soo

AU - Yang, Sung Hoon

AU - Hong, Wan Shick

PY - 2010

Y1 - 2010

N2 - We fabricated metal-insulator-semiconductor (MIS) capacitors and p-i-n diodes using silicon rich silicon nitride (SRSN) film containing silicon nanocrystals (Si NCs) prepared by catalytic chemical vapor deposition (Cat-CVD). Photo/dark current difference and photo/dark hysterisis appeared in the current-voltage (I-V) and the capacitance-voltage (C-V) curves, respectively.

AB - We fabricated metal-insulator-semiconductor (MIS) capacitors and p-i-n diodes using silicon rich silicon nitride (SRSN) film containing silicon nanocrystals (Si NCs) prepared by catalytic chemical vapor deposition (Cat-CVD). Photo/dark current difference and photo/dark hysterisis appeared in the current-voltage (I-V) and the capacitance-voltage (C-V) curves, respectively.

UR - http://www.scopus.com/inward/record.url?scp=79956335045&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:79956335045

SP - 533

EP - 534

T2 - 17th International Display Workshops, IDW'10

Y2 - 1 December 2010 through 3 December 2010

ER -

Photoconductivity in silicon rich silicon nitride films containing silicon nanocrystals prepared by catalytic CVD

Abstract

Conference

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