Photoconductivity in silicon rich silicon nitride films containing silicon nanocrystals prepared by catalytic CVD

Kyoung Min Lee; Jae Dam Hwang; Yeon Jin Lee; Ki Su Kuem; Kil Sun No; Kap Soo Yoon; Sung Hoon Yang; Wan Shick Hong

Photoconductivity in silicon rich silicon nitride films containing silicon nanocrystals prepared by catalytic CVD

Kyoung Min Lee
, Jae Dam Hwang
, Yeon Jin Lee
, Ki Su Kuem
, Kil Sun No
, Kap Soo Yoon
, Sung Hoon Yang
, Wan Shick Hong

Department of Materials Science and Engineering

Research output: Contribution to conference › Paper › peer-review

Abstract

We fabricated metal-insulator-semiconductor (MIS) capacitors and p-i-n diodes using silicon rich silicon nitride (SRSN) film containing silicon nanocrystals (Si NCs) prepared by catalytic chemical vapor deposition (Cat-CVD). Photo/dark current difference and photo/dark hysterisis appeared in the current-voltage (I-V) and the capacitance-voltage (C-V) curves, respectively.

Original language	English
Pages	533-534
Number of pages	2
State	Published - 2010
Event	17th International Display Workshops, IDW'10 - Fukuoka, Japan Duration: 1 Dec 2010 → 3 Dec 2010

Conference

Conference	17th International Display Workshops, IDW'10
Country/Territory	Japan
City	Fukuoka
Period	1/12/10 → 3/12/10

Cite this

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title = "Photoconductivity in silicon rich silicon nitride films containing silicon nanocrystals prepared by catalytic CVD",

abstract = "We fabricated metal-insulator-semiconductor (MIS) capacitors and p-i-n diodes using silicon rich silicon nitride (SRSN) film containing silicon nanocrystals (Si NCs) prepared by catalytic chemical vapor deposition (Cat-CVD). Photo/dark current difference and photo/dark hysterisis appeared in the current-voltage (I-V) and the capacitance-voltage (C-V) curves, respectively.",

author = "Lee, \{Kyoung Min\} and Hwang, \{Jae Dam\} and Lee, \{Yeon Jin\} and Kuem, \{Ki Su\} and No, \{Kil Sun\} and Yoon, \{Kap Soo\} and Yang, \{Sung Hoon\} and Hong, \{Wan Shick\}",

year = "2010",

language = "English",

pages = "533--534",

note = "17th International Display Workshops, IDW'10 ; Conference date: 01-12-2010 Through 03-12-2010",

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TY - CONF

T1 - Photoconductivity in silicon rich silicon nitride films containing silicon nanocrystals prepared by catalytic CVD

AU - Lee, Kyoung Min

AU - Hwang, Jae Dam

AU - Lee, Yeon Jin

AU - Kuem, Ki Su

AU - No, Kil Sun

AU - Yoon, Kap Soo

AU - Yang, Sung Hoon

AU - Hong, Wan Shick

PY - 2010

Y1 - 2010

N2 - We fabricated metal-insulator-semiconductor (MIS) capacitors and p-i-n diodes using silicon rich silicon nitride (SRSN) film containing silicon nanocrystals (Si NCs) prepared by catalytic chemical vapor deposition (Cat-CVD). Photo/dark current difference and photo/dark hysterisis appeared in the current-voltage (I-V) and the capacitance-voltage (C-V) curves, respectively.

AB - We fabricated metal-insulator-semiconductor (MIS) capacitors and p-i-n diodes using silicon rich silicon nitride (SRSN) film containing silicon nanocrystals (Si NCs) prepared by catalytic chemical vapor deposition (Cat-CVD). Photo/dark current difference and photo/dark hysterisis appeared in the current-voltage (I-V) and the capacitance-voltage (C-V) curves, respectively.

UR - https://www.scopus.com/pages/publications/79956335045

M3 - Paper

AN - SCOPUS:79956335045

SP - 533

EP - 534

T2 - 17th International Display Workshops, IDW'10

Y2 - 1 December 2010 through 3 December 2010

ER -

Photoconductivity in silicon rich silicon nitride films containing silicon nanocrystals prepared by catalytic CVD

Abstract

Conference

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