@inproceedings{6512599731854807abdfb3d80bac9a9e,
title = "Photoluminescence characteristics and chemical composition of SiN x:H films with various gas mixture ratio at low temperature",
abstract = "Hydrogenated silicon nitride (a-SiNx:H) thin films deposited at low substrate temperature (200°C) show the different bonding configurations and photoluminescence characteristics which depend on the silicon concentrations in the films controlled by the gas ratio R of nitrogen to silane during the deposition. The composition of SiNx:H film was analyzed by Fourier transform infrared spectroscopy (FTIR) and photoluminescence (PL) spectroscopy. We observed FTIR peak position were changed and PL energy variation with gas ratio R.",
author = "Hwang, {Jae Dam} and Lee, {Kyoung Min} and Keum, {Ki Su} and Seunghun Jang and Lee, {Youn Jin} and Moonsup Han and Hong, {Wan Shick}",
year = "2010",
language = "English",
isbn = "9781617827020",
series = "Proceedings of International Meeting on Information Display",
pages = "632--633",
booktitle = "10th International Meeting on Information Display and International Display Manufacturing Conference and Asia Display 2010, IMID/IDMC/ASIA Display 2010",
note = "10th International Meeting on Information Display and International Display Manufacturing Conference and Asia Display 2010, IMID/IDMC/ASIA Display 2010 ; Conference date: 11-10-2010 Through 15-10-2010",
}