Planarization and processing of metamorphic buffer layers grown by hydride vapor-phase epitaxy
- Brian T. Zutter
- , Kevin L. Schulte
- , Tae Wan Kim
- , Luke J. Mawst
- , T. F. Kuech
- , Brendan Foran
- , Yongkun Sin
- University of Wisconsin-Madison
- Aerospace Corporation
Research output: Contribution to journal › Article › peer-review
3
Scopus
citations