Predictive modeling of channel potential in 3-D NAND flash memory

Research output: Contribution to journalArticlepeer-review

16 Scopus citations

Abstract

For the first time, this brief analyzes the channel potential and capacitance in channel-stack type 3-D NAND flash memory structure. In addition, the effects of geometrical parameters on 3-D NAND flash design with gate-all-around and double-gate devices are studied. The model can be incorporated into a compact circuit model for 3-D NAND flash design optimization.

Original languageEnglish
Article number6913535
Pages (from-to)3901-3904
Number of pages4
JournalIEEE Transactions on Electron Devices
Volume61
Issue number11
DOIs
StatePublished - 1 Nov 2014

Keywords

  • 3-D NAND flash memory
  • capacitance modeling
  • nanowire SONOS
  • stacked array

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