TY - JOUR
T1 - Probability level dependence of failure mechanisms in Sub-20 nm NAND flash memory
AU - Kang, Duckseoung
AU - Lee, Kyunghwan
AU - Kang, Myounggon
AU - Seo, Seongjun
AU - Li, Dong Hua
AU - Hwang, Yuchul
AU - Shin, Hyungcheol
PY - 2014/3
Y1 - 2014/3
N2 - We extracted final Δ Vth, time constant, and activation energy (Ea) of each mechanism in retention characteristics of sub-20-nm NAND flash main-chip according to the probability level (P level) of Vth cumulative probability distribution. As a result, we confirmed that at lower P level, the final Δ Vth of each mechanism increases sensitively according to P/E cycling stress. Temperature dependence of the final Δ Vth of each mechanism also increases with lowering P level, whereas trap-assisted tunneling (TAT) mechanism of corner area has complex characteristics on temperature. Interface trap recovery, TAT (plane), and TAT (corner) mechanism have larger Ea at high P level, whereas the Ea of detrapping mechanism decreases because of barrier lowering effect.
AB - We extracted final Δ Vth, time constant, and activation energy (Ea) of each mechanism in retention characteristics of sub-20-nm NAND flash main-chip according to the probability level (P level) of Vth cumulative probability distribution. As a result, we confirmed that at lower P level, the final Δ Vth of each mechanism increases sensitively according to P/E cycling stress. Temperature dependence of the final Δ Vth of each mechanism also increases with lowering P level, whereas trap-assisted tunneling (TAT) mechanism of corner area has complex characteristics on temperature. Interface trap recovery, TAT (plane), and TAT (corner) mechanism have larger Ea at high P level, whereas the Ea of detrapping mechanism decreases because of barrier lowering effect.
KW - detrapping mechanism
KW - failure mechanism
KW - interface trap recovery
KW - NAND flash memory
KW - P level
KW - temperature dependence
KW - trap-assisted tunneling (TAT)
UR - http://www.scopus.com/inward/record.url?scp=84895927702&partnerID=8YFLogxK
U2 - 10.1109/LED.2014.2301164
DO - 10.1109/LED.2014.2301164
M3 - Article
AN - SCOPUS:84895927702
SN - 0741-3106
VL - 35
SP - 348
EP - 350
JO - IEEE Electron Device Letters
JF - IEEE Electron Device Letters
IS - 3
M1 - 6730693
ER -