Abstract
We extracted final Δ Vth, time constant, and activation energy (Ea) of each mechanism in retention characteristics of sub-20-nm NAND flash main-chip according to the probability level (P level) of Vth cumulative probability distribution. As a result, we confirmed that at lower P level, the final Δ Vth of each mechanism increases sensitively according to P/E cycling stress. Temperature dependence of the final Δ Vth of each mechanism also increases with lowering P level, whereas trap-assisted tunneling (TAT) mechanism of corner area has complex characteristics on temperature. Interface trap recovery, TAT (plane), and TAT (corner) mechanism have larger Ea at high P level, whereas the Ea of detrapping mechanism decreases because of barrier lowering effect.
| Original language | English |
|---|---|
| Article number | 6730693 |
| Pages (from-to) | 348-350 |
| Number of pages | 3 |
| Journal | IEEE Electron Device Letters |
| Volume | 35 |
| Issue number | 3 |
| DOIs | |
| State | Published - Mar 2014 |
Keywords
- detrapping mechanism
- failure mechanism
- interface trap recovery
- NAND flash memory
- P level
- temperature dependence
- trap-assisted tunneling (TAT)
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