TY - GEN
T1 - Quantitative synchrotron grazing incidence X-ray scattering analysis of cylindrical nanostructures in supported thin films
AU - Yoon, Jinhwan
AU - Yang, Seung Yun
AU - Heo, Kyuyoung
AU - Lee, Byeongdu
AU - Joo, Wonchul
AU - Kim, Jin Kon
AU - Ree, Moonhor
PY - 2007
Y1 - 2007
N2 - Nondestructive nanostructural analysis is indispensable in the development of nano-materials and nano-fabrication processes for use in nanotechnology applications. In this paper, we demonstrate a quantitative, nondestructive analysis of nanostructured thin films supported on substrates and their templated nanopores by using grazing incidence X-ray scattering and data analysis with a derived scattering theory. Our analysis disclosed that vertically oriented nanodomain cylinders had formed in 20-100 nm thick films supported on substrates, which were consisting of a mixture of poly(styrene-b-methyl methacrylate) (PS-b-PMMA) and PMMA homopolymer, and that the PMMA nanodomain cylinders were selectively etched out by ultraviolet light exposure and a subsequent rinse with acetic acid, resulting in a well-ordered nanostructure consisting of hexagonally packed cylindrical nanopores.
AB - Nondestructive nanostructural analysis is indispensable in the development of nano-materials and nano-fabrication processes for use in nanotechnology applications. In this paper, we demonstrate a quantitative, nondestructive analysis of nanostructured thin films supported on substrates and their templated nanopores by using grazing incidence X-ray scattering and data analysis with a derived scattering theory. Our analysis disclosed that vertically oriented nanodomain cylinders had formed in 20-100 nm thick films supported on substrates, which were consisting of a mixture of poly(styrene-b-methyl methacrylate) (PS-b-PMMA) and PMMA homopolymer, and that the PMMA nanodomain cylinders were selectively etched out by ultraviolet light exposure and a subsequent rinse with acetic acid, resulting in a well-ordered nanostructure consisting of hexagonally packed cylindrical nanopores.
KW - Grazing incidence X-ray scattering
KW - Nanostructure template
KW - Porous nanocylinder
KW - Quantitative scattering data analysis
UR - http://www.scopus.com/inward/record.url?scp=34547966070&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:34547966070
SN - 1420063421
SN - 9781420063424
SN - 1420063766
SN - 9781420063769
T3 - 2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007, Technical Proceedings
SP - 113
EP - 115
BT - 2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007, Technical Proceedings
T2 - 2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007
Y2 - 20 May 2007 through 24 May 2007
ER -