Reaction pathway for Sb-dimer rotation in conversion of Sb4 precursors on Si(001)

Byung Deok Yu, Atsushi Oshiyama

Research output: Contribution to journalArticlepeer-review

14 Scopus citations

Abstract

We report first-principles total-energy calculations that provide detailed reaction pathways for Sb-dimer rotation in evolving processes of Sb4 precursors on the Si(001) surface. We find that the total energy for the Sb dimer perpendicular to the subsurface Si dimers is lower than the parallel dimer by 0.45 eV. We also find a plausible reaction pathway for the Sb-dimer rotation during which only a single dangling bond is created. The calculated activation energy for the rotation is 1.0 eV, indicative that the dimer rotation is rate-determining in the evolving process of Sb4 precursors.

Original languageEnglish
Pages (from-to)8942-8945
Number of pages4
JournalPhysical Review B
Volume50
Issue number12
DOIs
StatePublished - 1994

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