Fingerprint
Dive into the research topics of 'RF power control for fabricating amorphous silicon nitride without Si-nanocrystals and its effect on defects and luminescence'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
RF power control for fabricating amorphous silicon nitride without Si-nanocrystals and its effect on defects and luminescence
Seunghun Jang, Moonsup Han
Research output: Contribution to journal › Article › peer-review
8
Scopus
citations