Selective deposition of cobalt oxide thin films via H₂O-vapor-catalyzed reaction

Material Science

• Particle 100%
• Thin Films 100%
• Oxide Compound 100%
• Cobalt 100%
• Vapor 100%
• Gas 75%
• Temperature 50%
• Mass Spectrometry 50%
• Fourier Transform Infrared Spectroscopy 50%
• Film 25%
• Scanning Electron Microscopy 25%
• Catalyst 25%
• X-Ray Photoelectron Spectroscopy 25%

Engineering

• Thin Films 100%
• Fourier Transform 100%
• Measurement 50%
• Fields 50%
• Substrates 50%
• Temperature 50%
• Determines 50%
• Flow Rate 50%
• Catalyst 50%
• Measurement System 50%
• Catalytic Reaction 50%
• Ray Photoelectron Spectroscopy 50%

Chemical Engineering

• Temperature 100%
• Cobalt 100%
• Mass Spectrometry 100%
• Oxide 100%
• Catalytic Reaction 50%