Abstract
A microhydrogen gas sensor platform was fabricated by a MEMS process. A nano-bumpy structure was produced using a polystyrene aqueous suspension to develop the surface areas of the sensing area (palladium thin film). The palladium film was deposited on a fabricated platform by a radio frequency magnetron sputtering. A cross section of each AFM image was analyzed to determine the mean surface roughness. The root-mean square roughness of the 1-layer nano-bumpy Pd structure and 2-layers nanobumpy Pd structure were 9.07 nm and 13.1 nm, respectively, whereas that of the Pd thin film was 0.98 nm. The sensitivities of the Pd thin film sensor, mono-layer nano-bumpy sensor and double-layers nanobumpy sensor at hydrogen gas concentrations of 2000 ppm was 0.638%, 1.045% and 1.511%, respectively.
Original language | English |
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Pages (from-to) | 540-545 |
Number of pages | 6 |
Journal | Sensors and Actuators, B: Chemical |
Volume | 187 |
DOIs | |
State | Published - 2013 |
Keywords
- Hydrogen gas sensor
- MEMS
- Nano-bumpy structure
- Palladium
- R.F. magnetron sputtering