Sensing properties for a microhydrogen sensor with modified palladium film

Jin Ho Yoon, Bum Joon Kim, Jung Sik Kim

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5 Scopus citations


A microhydrogen gas sensor platform was fabricated by a MEMS process. A nano-bumpy structure was produced using a polystyrene aqueous suspension to develop the surface areas of the sensing area (palladium thin film). The palladium film was deposited on a fabricated platform by a radio frequency magnetron sputtering. A cross section of each AFM image was analyzed to determine the mean surface roughness. The root-mean square roughness of the 1-layer nano-bumpy Pd structure and 2-layers nanobumpy Pd structure were 9.07 nm and 13.1 nm, respectively, whereas that of the Pd thin film was 0.98 nm. The sensitivities of the Pd thin film sensor, mono-layer nano-bumpy sensor and double-layers nanobumpy sensor at hydrogen gas concentrations of 2000 ppm was 0.638%, 1.045% and 1.511%, respectively.

Original languageEnglish
Pages (from-to)540-545
Number of pages6
JournalSensors and Actuators, B: Chemical
StatePublished - 2013


  • Hydrogen gas sensor
  • MEMS
  • Nano-bumpy structure
  • Palladium
  • R.F. magnetron sputtering


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