TY - GEN
T1 - Sensor array based on metal oxide semiconductors for detecting gas mixtures and its sensing properties
AU - Kim, Byung Min
AU - Kim, Jung Sik
N1 - Publisher Copyright:
© Copyright 2016 by SCITEPRESS- Science and Technology Publications, Lda. All rights reserved.
PY - 2016
Y1 - 2016
N2 - Metal oxide semiconductor (MOS) gas sensors are very attractive owing to their low cost simplicity of use, large number of detectable gases and various potential application fields. However, the MOS gas sensor has a serious shortcoming of low selectivity in a mixture of gases, In this study MOS micro gas sensors were fabricated for detecting carbon monoxide (CO), nitrogen oxide (NO2), ammonia (NH3) and formaldehyde (HCHO) gases, as well as their binary mixed gas systems. Four sensing materials, Pd-SnO2 for CO, In2O3 for NOX, Ru-WO3 for NH3, and SnO2-ZnO for HCHO were synthesized using a sol-gel method and deposited in the middle of sensor platform. The micro gas sensor platform was fabricated by using a MEMS technology. The sensing electrode and micro heater were designed to be a co-planar type structure with the Pt thin film layer. The gas sensitivity and sensing behaviour for gas mixtures suggested that the selective adsorption of one gas with respect to others occurred for gas mixture and resulted in good selectivity for a particular gas species. Furthermore, the careful pattern recognition of sensing data obtained with sensor array makes it possible to distinguish a gas species from gas mixture and to measure its concentration.
AB - Metal oxide semiconductor (MOS) gas sensors are very attractive owing to their low cost simplicity of use, large number of detectable gases and various potential application fields. However, the MOS gas sensor has a serious shortcoming of low selectivity in a mixture of gases, In this study MOS micro gas sensors were fabricated for detecting carbon monoxide (CO), nitrogen oxide (NO2), ammonia (NH3) and formaldehyde (HCHO) gases, as well as their binary mixed gas systems. Four sensing materials, Pd-SnO2 for CO, In2O3 for NOX, Ru-WO3 for NH3, and SnO2-ZnO for HCHO were synthesized using a sol-gel method and deposited in the middle of sensor platform. The micro gas sensor platform was fabricated by using a MEMS technology. The sensing electrode and micro heater were designed to be a co-planar type structure with the Pt thin film layer. The gas sensitivity and sensing behaviour for gas mixtures suggested that the selective adsorption of one gas with respect to others occurred for gas mixture and resulted in good selectivity for a particular gas species. Furthermore, the careful pattern recognition of sensing data obtained with sensor array makes it possible to distinguish a gas species from gas mixture and to measure its concentration.
KW - Gas mixture
KW - Gas sensor array
KW - MEMS micro sensor
KW - Metal oxide semiconducting materials
UR - http://www.scopus.com/inward/record.url?scp=84971453914&partnerID=8YFLogxK
U2 - 10.5220/0005738201690174
DO - 10.5220/0005738201690174
M3 - Conference contribution
AN - SCOPUS:84971453914
T3 - SENSORNETS 2016 - Proceedings of the 5th International Confererence on Sensor Networks
SP - 169
EP - 174
BT - SENSORNETS 2016 - Proceedings of the 5th International Confererence on Sensor Networks
A2 - Ahrens, Andreas
A2 - Postolache, Octavian
A2 - Benavente-Peces, Cesar
PB - SciTePress
T2 - 5th International Confererence on Sensor Networks, SENSORNETS 2016
Y2 - 19 February 2016 through 21 February 2016
ER -