Silicon nanocluster formation by a pulse-type gas feeding technique in the LPCVD system for the nonvolatile memory applications
- Kyongmin Kim
- , Eunkyeom Kim
- , Myeongwook Bae
- , Daeho Son
- , Juhyung Lee
- , Moonsup Han
- , Junghyun Sok
- , Kyoungwan Park
- University of Seoul
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review