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Silicon nanocluster formation by a pulse-type gas feeding technique in the LPCVD system for the nonvolatile memory applications
Kyongmin Kim, Eunkyeom Kim, Myeongwook Bae, Daeho Son, Juhyung Lee, Moonsup Han, Junghyun Sok, Kyoungwan Park
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review