@inproceedings{6f559c23196a4a4481178f5007e0e338,
title = "Synchrotron grazing incidence X-ray scattering and reflectivity analysis of nano-structures and patterns supported with substrates",
abstract = "The grazing incidence X-ray scattering (GIXS) from structures within a thin film on a substrate is generally a superposition of the two scatterings generated by the two X-ray beams (reflected and transmitted beams) converging on the film with a difference of twice the incidence angle αi of the X-ray beam in their angular directions; these two scatterings may overlap or may be distinct, depending on αi. The two scatterings are further distorted by the effects of refraction. These reflection and refraction effects mean that GIXS is complicated to analyze. To quantitatively analyze GIXS patterns, a GIXS formula was derived under the distorted wave Born approximation. We applied this formula to the quantitative analysis of the GIXS patterns obtained for nano-structures and patterns fabricated with various polymer systems, which were supported with substrates. In addition, specular X-ray reflectivity studies were performed the nano-structures and patterns.",
keywords = "Grazing incidence X-ray scattering, Nano-pattern, Nano-structure, Specular X-ray reflectivity",
author = "Moonhor Ree and Jinhwan Yoon and Kyuyoung Heo and Jin, {Kyeong Sik} and Sangwoo Jin and Byeongdu Lee and Insun Park and Choi, {Seung Chul} and Ghahee Kim and Hyunchul Kim and Weontae Oh and Park, {Young Hee} and Yongtaek Hwang and Kim, {Jong Seong} and Jehan Kim and Kim, {Kwang Woo} and Taihyun Chang",
year = "2007",
language = "English",
isbn = "1420063421",
series = "2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007, Technical Proceedings",
pages = "1--4",
booktitle = "2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007, Technical Proceedings",
note = "2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007 ; Conference date: 20-05-2007 Through 24-05-2007",
}