Thermal-Aware Shallow Trench Isolation Design Optimization for Minimizing /OFF in Various Sub-10-nm 3-D Transistors

Ilho Myeong, Dokyun Son, Hyunsuk Kim, Myounggon Kang, Jongwook Jeon, Hyungcheol Shin

Research output: Contribution to journal › Article › peer-review

18 Scopus citations

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Material Science

Engineering