Thermodynamic equilibrium calculation of Cu(s)-Cl 2 (g) reaction

Myoung Seok Kwon, Jeong Yong Lee

Research output: Contribution to journalArticlepeer-review

1 Scopus citations


Thermodynamic calculations of the equilibrium compositions of condensed- and gaseous-reaction products from the reaction between Cu(s) and Cl 2 (g) has been performed to understand the fundamental reactions during the Cl-based dry etching of Cu thin film. Total pressure was fixed at 5mTorr, which is typical for high-density plasma etching. The final phase equilibrium state of Cu(s)-Cl 2 (g) system was determined by using the minimization of the total free energy of the system as a function of temperature and initial Cl 2 (g)/Cu(s) molar ratio, and the calculated phase equilibrium results were discussed in relation to the Cl-based Cu dry etch reaction.

Original languageEnglish
Pages (from-to)158-168
Number of pages11
JournalApplied Surface Science
Issue number1-4
StatePublished - 28 Feb 2003


  • Chlorine
  • Cu
  • Equilibrium
  • Phase
  • Reaction


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